Optical interferometric characterization of membrane curvature in boron-doped Si microstructures
- Author(s):
- Weigold,J.W. ( Univ.of Michigan )
- Juan,W.H. ( Univ.of Michigan )
- Pang,S.W. ( Univ.of Michigan )
- Borenstein,J.T. ( Charles Stark Draper Lab.,Inc. )
- Publication title:
- Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3223
- Pub. Year:
- 1997
- Page(from):
- 142
- Page(to):
- 148
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426550 [0819426555]
- Language:
- English
- Call no.:
- P63600/3223
- Type:
- Conference Proceedings
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