Optical applications of silicon micromachining technology (Invited Paper)
- Author(s):
- Trott,C.R. ( Hewlett-Packard Co. )
- Yang,L. ( Hewlett-Packard Co. )
- Carey,K. ( Hewlett-Packard Co. )
- Ratowsky,R.P. ( Lawrence Livermore National Lab. )
- Kallman,J.S. ( Lawrence Livermore National Lab. )
- Publication title:
- Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3223
- Pub. Year:
- 1997
- Page(from):
- 120
- Page(to):
- 129
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426550 [0819426555]
- Language:
- English
- Call no.:
- P63600/3223
- Type:
- Conference Proceedings
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