New developments of process technologies for microfabrication
- Author(s):
- Piotter,V. ( Forschungszentrum Karlsruhe GmbH (FRG) )
- Hanemann,T. ( Forschungszentrum Karlsruhe GmbH (FRG) )
- Ruprecht,R. ( Forschungszentrum Karlsruhe GmbH (FRG) )
- Thies,A. ( Forschungszentrum Karlsruhe GmbH (FRG) )
- HouBelt,J.H. ( Forschungszentrum Karlsruhe GmbH (FRG) )
- Publication title:
- Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3223
- Pub. Year:
- 1997
- Page(from):
- 91
- Page(to):
- 99
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426550 [0819426555]
- Language:
- English
- Call no.:
- P63600/3223
- Type:
- Conference Proceedings
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