Wet chemical isotropic etching procedures of silicon: a possibility for the production of deep-structured microcomponents
- Author(s):
- Schwesinger,N. ( Technische Univ.Ilmenau (FRG) )
- Albrecht,A. ( Technische Univ.Ilmenau (FRG) )
- Publication title:
- Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3223
- Pub. Year:
- 1997
- Page(from):
- 72
- Page(to):
- 79
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819426550 [0819426555]
- Language:
- English
- Call no.:
- P63600/3223
- Type:
- Conference Proceedings
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