Precise micronanomachining for advanced sensors (Invited Paper)

Author(s):

• Esashi,M. ( Tohoku Univ.(Japan) )
• Ono,T. ( Tohoku Univ.(Japan) )
• Minami,K. ( Tohoku Univ.(Japan) )

Publication title:

Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3223

Pub. Year:

1997

Page(from):

44

Page(to):

55

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819426550 [0819426555]

Language:

English

Call no.:

P63600/3223

Type:

Conference Proceedings