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SAMPLE (Sandia agile MEMS prototyping,layout tools,and education)

Author(s):
Craig Barron,C. ( Sandia National Labs. )
Davies,B.R. ( Sandia National Labs. )
Sniegowski,J.J. ( Sandia National Labs. )
Rodgers,M.S. ( Sandia National Labs. )
Comtois,J.H. ( Air Force Phillips Lab. )
Michalicek,M.A. ( Air Force Phillips Lab. )
1 more
Publication title:
Micromachining and microfabrication process technology III : 29-30 September, 1997, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3223
Pub. Year:
1997
Page(from):
10
Page(to):
16
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819426550 [0819426555]
Language:
English
Call no.:
P63600/3223
Type:
Conference Proceedings

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