New software algorithm of 3D surface profile measurement based on phase-shift interfering technology

New software algorithm of 3D surface profile measurement based on phase-shift interfering technology

Author(s):

Liu,B. ( Harbin Univ.of Science and Technology (China) )
Fan,J. ( Harbin Univ.of Science and Technology (China) )
Yang,L. ( Harbin Univ.of Science and Technology (China) )
Wang,Q. ( Harbin Univ.of Science and Technology (China) )

Publication title:

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3275

Pub. Year:

1998

Page(from):

9

Page(to):

14

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819427144 [0819427144]

Language:

English

Call no.:

P63600/3275

Type:

Conference Proceedings

Details

TDL ID:	ZA00017860
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Flatness, Roughness, and Discrete Defects Characterization for Computer Disks, Wafers, and Flat Panel Displays
Conf. info. (Number):	1998 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1998.01.29-1998.01.30

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