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Feasibility studies of operating KrF lasers at ultranarrow spectral bandwidths for 0.18-ｦﾌm line widths

Author(s):
Ershov,A.I. ( Cymer,Inc. )
Hofmann,T. ( Cymer,Inc. )
Partlo,W.N. ( Cymer,Inc. )
Fomenkov,I.V. ( Cymer,Inc. )
Everage,G. ( Cymer,Inc. )
Das,P.P. ( Cymer,Inc. )
Myers,D. ( Cymer,Inc. )
2 more
Publication title:
Optical microlithography XI : 25-27 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3334
Pub. Year:
1998
Page(from):
1021
Page(to):
1030
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427793 [0819427799]
Language:
English
Call no.:
P63600/3334
Type:
Conference Proceedings

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