Blank Cover Image

Reticle contributions to CD uniformity for 0.25-ヲフm DUV lithography

Author(s):
Publication title:
Optical microlithography XI : 25-27 February 1998, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3334
Pub. Year:
1998
Page(from):
620
Page(to):
628
Pub. info.:
Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819427793 [0819427799]
Language:
English
Call no.:
P63600/3334
Type:
Conference Proceedings

Similar Items:

Ronse,K., Maenhoudt,M., Marschner,T., Van,den,hove,L., Streefkerk,B., Finders,J., van,Schoot,J., Luehrmann,P.F., …

SPIE-The International Society for Optical Engineering

Kim,J.H., Moon,S.C., Ko,B.S., Park,J.H., Lee,T.G., Shin,K.S., Kim,D.H.

SPIE-The International Society for Optical Engineering

Farrell,T.R., Nunes,R., Campbell,R., Hoh,P., Samuels,D.J., Kirk,J.P., Conley,W.E., Iba,J., Shibata,T.

SPIE-The International Society for Optical Engineering

Venkatraman, R., Jain, A., Farkas, J., Mendonca, J., Hamilton, G., Capasso, C., Denning, D., Simpson, C., Rogers, B., …

MRS - Materials Research Society

Tritchkov,A., Rieger,M.L., Stirniman,J.P., Yen,A., Ronse,K., Vandenberghe,G., hove,L.Van den

SPIE-The International Society for Optical Engineering

Hayden,J.D., McNelly,T.F., Perera,A.H., Pfiester,J.R., Subramanian,C.K., Thompson,M.A.

SPIE-The International Society for Optical Engineering

Beeck,M.Op de, Ronse,K., Ghandehari,K., Jaenen,P., Botermans,H., Finders,J., Lilygren,J.A., Baker,D.C., Vandenberghe,G., …

SPIE-The International Society for Optical Engineering

Sturtevant,J.L., Weilemann,M.R., Green,K.G., Dwyer,J., Robertson,E., Hershey,R.R.

SPIE-The International Society for Optical Engineering

Kling,M.E., Lucas,K.D., Reich,A., Roman,B.J., Chuang,H., Gilbert,P.V., Grobman,W.D., Travis,E.O., Tsui,P., Vuong,T., …

SPIE-The International Society for Optical Engineering

White,T.R., Kolar,D., Jahanbani,M., Frisa,L.E., Nagabushnam,R., Chuang,H., Tsui,P., Cope,J., Pulvirent,L., Bolton,S.

SPIE-The International Society for Optical Engineering

Gunji,T., Kitagawa,T., Tsuboi,K.

SPIE-The International Society for Optical Engineering

Gerung,H., Chhagan,V.K., Yelehanka,P.R., Zhou,M.S., Hui,J.K.L.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12