Reticle contributions to CD uniformity for 0.25-ヲフm DUV lithography
- Author(s):
- Kuijten,J.P. ( ASM Lithography BV (Netherlands) )
- Duray,F. ( ASM Lithography BV (Netherlands) )
- der,Kinderen,T. ( ASM Lithography BV (Netherlands) )
- Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 620
- Page(to):
- 628
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
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