Pupil illumination: in-situ measurement of partial coherence
- Author(s):
- Kirk,J.P. ( IBM Microelectronics Div. )
- Progler,C.J. ( IBM Microelectronics Div. )
- Publication title:
- Optical microlithography XI : 25-27 February 1998, Santa Clara, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3334
- Pub. Year:
- 1998
- Page(from):
- 281
- Page(to):
- 288
- Pub. info.:
- Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819427793 [0819427799]
- Language:
- English
- Call no.:
- P63600/3334
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Application of blazed gratings for determination of equivalent primary azimuthal aberrations
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
A comparison of ATSR and shipboard radiometer SST measurements along transects between the UK and the Antarctic
ESA Publications Division |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
5
Conference Proceedings
Illumination pupil fill measurement and analysis and its application in scanner V-H bias characterization for 130-nm node and beyond
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
12
Conference Proceedings
Critical evaluation of photomask needs for competing 65-nm node RET options
SPIE-The International Society for Optical Engineering |