High-transmittance rim-type attenuated phase-shift masks for sub-0.2-ヲフm hole patterns
- Author(s):
- Iwasaki,H. ( NEC Corp. (Japan) )
- Hoshi,K. ( NEC Corp. (Japan) )
- Tanabe,H. ( NEC Corp. (Japan) )
- Publication title:
- Photomask and X-Ray Mask Technology V
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3412
- Pub. Year:
- 1998
- Page(from):
- 601
- Page(to):
- 608
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819428646 [0819428647]
- Language:
- English
- Call no.:
- P63600/3412
- Type:
- Conference Proceedings
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