Extremely high aspect ratio metal structures for suspension of a micro-optical shutter
- Author(s):
- Publication title:
- Microelectronic Structures and MEMS for Optical Processing IV
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3513
- Pub. Year:
- 1998
- Page(from):
- 233
- Page(to):
- 238
- Pub. info.:
- Bellingham, Wash.: SPIE-The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819429728 [0819429724]
- Language:
- English
- Call no.:
- P63600/3513
- Type:
- Conference Proceedings
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