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Silicon wafer-scale microfabrication factory using scanning probe microrobots: applications of MOEMS in manufacturing

Author(s):
Publication title:
Microelectronic Structures and MEMS for Optical Processing IV
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3513
Pub. Year:
1998
Page(from):
144
Page(to):
154
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819429728 [0819429724]
Language:
English
Call no.:
P63600/3513
Type:
Conference Proceedings

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