Fabrication of replicated high-precision insert elements for micro-optical bench arrangements

Fabrication of replicated high-precision insert elements for micro-optical bench arrangements

Author(s):

Schift,H. ( Paul Scherrer Institute (Switzerland) )
Sochtig,J. ( CSEM Zurich (Switzerland) )
Glaus,F. ( Paul Scherrer Institute (Switzerland) )
Vonlanthen,F. ( Paul Scherrer Institute (Switzerland) )
Westenhofer,S. ( CSEM Zurich (Switzerland) )

Publication title:

Microelectronic Structures and MEMS for Optical Processing IV

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3513

Pub. Year:

1998

Page(from):

122

Page(to):

134

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819429728 [0819429724]

Language:

English

Call no.:

P63600/3513

Type:

Conference Proceedings

Details

TDL ID:	ZA00017845
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Microelectronic Stuctures and MEMS for Optical Processing
Conf. info. (Number):	1998 : 4th
Conf. info. (Venue):	Santa Clara, CA, USA
Conf. info. (Date):	1998.09.21-1998.09.22

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