Enhanced diffusion and formation of defects during thermal oxidation
- Author(s):
- Narayan, J. ( Solid State Division, Oak Ridge National Laboratory )
- Fletcher, J. ( Solid State Division, Oak Ridge National Laboratory )
- Appleton, B.R. ( Solid State Division, Oak Ridge National Laboratory )
- Christie, W.H. ( Solid State Division, Oak Ridge National Laboratory )
- Publication title:
- Defects in semiconductors : proceedings of the Materials Research Society Annual Meeting, November 1980, Copley Plaza Hotel, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposia proceedings
- Ser. no.:
- 2
- Pub. Year:
- 1981
- Page(from):
- 355
- Page(to):
- 365
- Pub. info.:
- New York: North Holland
- ISSN:
- 02729172
- ISBN:
- 9780444005960 [044400596X]
- Language:
- English
- Call no.:
- M23500/2
- Type:
- Conference Proceedings
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