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Physics of Glow Discharge Plasma/Surface Interactions During Thin Film Growth

Author(s):
Sundgren J-E.  
Publication title:
Diamond and diamond-like films and coatings
Title of ser.:
NATO ASI series. Series B, Physics
Ser. no.:
266
Pub. Year:
1991
Page(from):
47
Page(to):
71
Pages:
25
Pub. info.:
New York: Plenum Press
ISBN:
9780306440045 [0306440040]
Language:
English
Call no.:
N11479/266
Type:
Conference Proceedings

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