Mechanical properties of PECVD silicon oxide films suitable for integrated optics applications

Mechanical properties of PECVD silicon oxide films suitable for integrated optics applications

Author(s):

Publication title:

Silicon-based optoelectronics II : 28 January 2000, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3953

Pub. Year:

2000

Page(from):

142

Page(to):

149

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435705 [0819435708]

Language:

English

Call no.:

P63600/3953

Type:

Conference Proceedings

Details

TDL ID:	ZA00017640
Series ID:	PA00000029
Conf. info. (Name):	Photonics West - Optoelectronic Materials and Devices : Silicon-based optoelectronics
Conf. info. (Number):	2000 : 2nd
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2000.01.28

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