Laser micromachining:new developments and applications
- Author(s):
- Rizvi,N.H. ( Exitech Ltd )
- Milne,D.K.
- Rumsby,P.T.
- Gower,M.C.
- Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3933
- Pub. Year:
- 2000
- Page(from):
- 261
- Page(to):
- 271
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435507 [0819435503]
- Language:
- English
- Call no.:
- P63600/3933
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
New developments and applications in the production of 3D microstructures by laser micromachining
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Excimer laser micromachining system for the production of bioparticle electromanipulation devices
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
Manufacture of miniature bioparticle electromanipulators by excimer laser ablation
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Laser micromachining: new techniques and developments for display applications
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
193-nm imaging using a small-field high-resolution imaging resist exposure tool
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |