Pulsed-Laser deposition of AIN thin films

Pulsed-Laser deposition of AIN thin films

Author(s):

Lu,Y.F. ( National Univ.of Singapore )

Publication title:

Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3933

Pub. Year:

2000

Page(from):

182

Page(to):

189

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435507 [0819435503]

Language:

English

Call no.:

P63600/3933

Type:

Conference Proceedings

Details

TDL ID:	ZA00017638
Series ID:	PA00000029
Conf. info. (Name):	SPIE LASE : Laser applications in microelectronic and optoelectronic manufacturing
Conf. info. (Number):	2000 : 5th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2000.01.24-2000.01.26

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