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Pulsed-Laser deposition of electronic oxides:superconductor and semiconductor applications

Author(s):
Norton,D.P. ( Oak Ridge National Lab. )
Park,C.
Lee,Y.E.
Budai,J.D.
Chisholm,M.F.
Verebelyi,D.T.
Christen,D.K.
Kroeger,D.M.
3 more
Publication title:
Laser applications in microelectronic and optoelectronic manufacturing V : 24-26 January 2000, San Jose, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3933
Pub. Year:
2000
Page(from):
124
Page(to):
130
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435507 [0819435503]
Language:
English
Call no.:
P63600/3933
Type:
Conference Proceedings

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