Development of micromachined vibration sensors for MEMS applications
- Author(s):
- Publication title:
- Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3903
- Pub. Year:
- 1999
- Page(from):
- 153
- Page(to):
- 161
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435132 [0819435139]
- Language:
- English
- Call no.:
- P63600/3903
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Two Level Low Conductivity SiO2 Support Structure for Uncooled IR-Sensor Based on MEMS Technology
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Performance of Micro Flow Meter on Silicon Chip Fabricated by Bulk Micromachining
Narosa Publishing House |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering, Narosa |
SPIE - The International Society of Optical Engineering |
12
Conference Proceedings
Design and development of smart skin conformal antennas with MEMS structural sensors and actuators
SPIE-The International Society for Optical Engineering |