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High-resolution x-ray diffraction study of free-standing gallium arsenide coiled membrane force sensors produced by micrmachining

Author(s):
Publication title:
Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3903
Pub. Year:
1999
Page(from):
77
Page(to):
83
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819435132 [0819435139]
Language:
English
Call no.:
P63600/3903
Type:
Conference Proceedings

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