Fabrication of micromechanical structures in silicon using SF6/02 gas mixtures

Fabrication of micromechanical structures in silicon using SF6/02 gas mixtures

Author(s):

Paul,A.K. ( Central Scientific Instruments Organization )
Dimri,A.K.
Mohan,S.

Publication title:

Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3903

Pub. Year:

1999

Page(from):

2

Page(to):

8

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819435132 [0819435139]

Language:

English

Call no.:

P63600/3903

Type:

Conference Proceedings

Details

TDL ID:	ZA00017635
Series ID:	PA00000029
Conf. info. (Name):	Indo-Russian Workshop on Micromechanical Systems
Conf. info. (Number):	1999
Conf. info. (Venue):	New Delhi, India
Conf. info. (Date):	1999.02.02-1999.02.04

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