Micromirror device with tilt and piston motions
- Author(s):
- Chiou,J.C. ( National Chiao Tung Univ. )
- Lin,Y.C.
- Publication title:
- Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3893
- Pub. Year:
- 1999
- Page(from):
- 298
- Page(to):
- 303
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434944 [0819434949]
- Language:
- English
- Call no.:
- P63600/3893
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
A back-to-back micromirror device for optical add/drop multiplexer applications
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
Confocal microscopy scanned by digital micromirror device with stray light filters
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Investigating the Deformation, Breakage and Number on Conductive Particle of Flim-on- Glass Packaging Using Anisotropic Conductive Film Bonding
Trans Tech Publications |
3
Conference Proceedings
A tilting micromirror with well-controlled digital angle through constrained lever structure
SPIE - The International Society of Optical Engineering |
9
Conference Proceedings
Design and fabrication of tilting and piston micromirrors for maskless lithography
SPIE - The International Society of Optical Engineering |
4
Conference Proceedings
Dynamic characteristics measurement system for optical scanning micromirror
SPIE-The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
5
Conference Proceedings
Wavefront correction using micromirror arrays: comparing the efficacy of tip-tilt-piston and piston-only micromirror arrays [6342-11]
SPIE - The International Society of Optical Engineering |
11
Conference Proceedings
Optical-electromechanical performance of MEMS tilting micromirrors for AON communication system
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |