Novel design of a MEMS-based tactile sensor

Novel design of a MEMS-based tactile sensor

Author(s):: Singh,R. ( Singapore Polytechnic )
Publication title:: Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 3893
Pub. Year:: 1999
Page(from):: 250
Page(to):: 261
Pub. info.:: Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819434944 [0819434949]
Language:: English
Call no.:: P63600/3893
Type:: Conference Proceedings

Details

TDL ID:	ZA00017634
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
Conf. info. (Number):	1999
Conf. info. (Venue):	Royal Pines Resort, Queensland, Australia
Conf. info. (Date):	1999.10.27-1999.10.29

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