Development of a high-energy-resolution x-ray microcalorimeter using Ti/Au TES
- Author(s):
Kudo,H. ( Waseda Univ. ) Yokoyama,Y. Shoji,S. Oshima,T. Aruga,Y. Maegami,K. Fujimoto,R. Miyazaki,T. Mitsuda,K. - Publication title:
- Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3893
- Pub. Year:
- 1999
- Page(from):
- 241
- Page(to):
- 249
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434944 [0819434949]
- Language:
- English
- Call no.:
- P63600/3893
- Type:
- Conference Proceedings
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