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CFD simulation of pulsed MOCVD to reduce gas-phase parasitic reaction

Author(s):
Publication title:
Materials research in low gravity II : 19-21 July 1999, San Diego, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3792
Pub. Year:
1999
Page(from):
58
Page(to):
72
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432780 [0819432784]
Language:
English
Call no.:
P63600/3792
Type:
Conference Proceedings

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