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Fine OPC approach with gray-tone coding mask

Author(s):
Du,J. ( Sichuan Univ. )
Su,J.
Huang,Q.
Zhang,Y.
Guo,Y.
Du,C.
Cui,Z.
2 more
Publication title:
Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3740
Pub. Year:
1999
Page(from):
348
Page(to):
351
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432148 [0819432148]
Language:
English
Call no.:
P63600/3740
Type:
Conference Proceedings

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