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Measurement of thicknesses and refractive indices by low-coherence confocal interferometric microscopy

Author(s):
Publication title:
Selected papers from International Conference on Optics and Optoelectronics '98 : Silber Jubilee Symposium of the Optical Society of India : 9-12 December 1998, Dehradun, India
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3729
Pub. Year:
1999
Page(from):
371
Page(to):
383
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432032 [0819432032]
Language:
English
Call no.:
P63600/3729
Type:
Conference Proceedings

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