Theoretical and experimental studies of(AIN)1-x(SIC)x layer structures formed by N + and AI + coimplantation in 6H-SiC

Theoretical and experimental studies of(AIN)1-x(SIC)x layer structures formed by N + and AI + coimplantation in 6H-SiC

Author(s):

Kulikov,D.V. ( A.F.loffe Physical-Technical Institute )

Publication title:

International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering : 8-12 June 1998, St. Petersburg, Russia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3687

Pub. Year:

1999

Page(from):

254

Page(to):

257

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819431615 [0819431613]

Language:

English

Call no.:

P63600/3687

Type:

Conference Proceedings

Details

TDL ID:	ZA00017615
Series ID:	PA00000029
Conf. info. (Name):	International Workshop on New Approaches to High-Tech Materials-Nondestructive Testing and Computer Simulations in Materials Science and Engineering
Conf. info. (Number):	1998 : 2nd
Conf. info. (Venue):	St. Petersburg, Russia
Conf. info. (Date):	1998.06.08-1998.06.12

Similar Items:

1 Conference Proceedings Computer simulation and RBS/C studies of high-dose N+ and Al- co-implantation in 6H-SiC Kharlamov,V.S., Kulikov,D.V., Trushin,Yu.V., Tsigankov,D.N., Yankov,R.A., Voelskow,M., Skorupa,W., Pezoldt,J. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Ion Beam Synthesis:A Novel Method of Producing(SiC)1-x(AlN)x Layers Yankov,R.A., Fukarek,W., Voelskow,M., Pezoldt,J., Skorupa,W. Trans Tech Publications
2 Conference Proceedings Influence of internal stress fields due to point defect clusters on interstitial diffusion in SiC under irradiation Rybin,P.V., Kulikov,D.V., Trushin,Yu.V., Petzoldt,J., Yankov,R.A. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Physical model of pinning center annealing processes in neutron-irradiated YBaCuO Kulikov,D.V., Suris,R.A., Trushin,Yu.V., Kharlamov,V.S., Tsignankov,D.N. SPIE-The International Society for Optical Engineering
3 Conference Proceedings A Computational Model for the Formation of(SiC)1-x(AlN)x Structures by Hot,High-Dose N+ and Al+ Co-Implants in 6H-SiC Truschin,Yu.V., Yankov,R.A., Kharlamov,V.S., Kulikov,D.V., Tsigankov,D.N., Kreissig,U., Voelskow,M., Pezoldt,J., … Trans Tech Publications	9 Conference Proceedings Nucleation of SiC on Si and their relationship to nano-dot formation: II. Theoretical investigation Safonov, K.L., Kulikov, D.V., Trushin, Y.V., Pezoldt, J. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Al+ and N+ implantation in silicon carbide: a role of point defect clusters in defect evolution Rybin,P.V., Kulikov,D.V., Trushin,Yu.V., Petzoldt,J. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Concentration Profile Simulation of SiC/Si Heterostructures J. Pezoldt, V.S. Kharlamov, D.V. Kulikov, M.N. Lubov, Y.V. Trushin Trans Tech Publications
5 Conference Proceedings Modelling the Formation of Nano-Sized SiC on Si Safonov, K.L., Schmidt, A.A., Trushin, Yu.V., Kulikov, D.V., Cimalla, V., Pezoldt, J. Trans Tech Publications	11 Conference Proceedings Physical model of copper clusters formation in hydrogenated amorphous carbon grown by ion cosputtering of graphite and copper Kulikov,D.V., Trushin,Yu.V., Kharlamov,V.S. SPIE - The International Society for Optical Engineering
6 Conference Proceedings Formation of Buried Layers of (SiC)1-x(AlN)x in 6H-SiC Using Ion-Beam Synthesis Yankov, R. A., Hatzopoulos, N., Fukarek, W., Voelskow, M., Heera, V., Pezoldt, J., Skorupa, W. MRS - Materials Research Society	12 Conference Proceedings Influence of the growth temperature on SiC nanocluster nucleation on Si(111) surface during MBE process Safonov, K.L., Kulikov, D.V., Trushin, Y.V., Pezoldt, J. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12