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Marathon testing of optical materials for 193-nm lithographic applications

Author(s):
Liberman,V. ( MIT Lincoln Lab. )
Rothschild,M.
Sedlacek,J.H.
Uttaro,R.S.
Bates,A.K.
Peski,C.K.Van
1 more
Publication title:
Laser-Induced Damage in Optical Materials: 1998
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3578
Pub. Year:
1999
Page(from):
2
Page(to):
15
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430458 [0819430455]
Language:
English
Call no.:
P63600/3578
Type:
Conference Proceedings

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