Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Chemical vapor detection using microfabricated flexural plate silicon resonator arrays

Author(s):

Cunningham,B.T. ( Draper Lab. )

Publication title:

Chemical and biological sensing : 24-25 April 2000, Orlando, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

4036

Pub. Year:

2000

Page(from):

151

Page(to):

162

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436627 [0819436623]

Language:

English

Call no.:

P63600/4036

Type:

Conference Proceedings

Details

TDL ID:	ZA00017591
Series ID:	PA00000029
Conf. info. (Name):	Defense, Security, and Sensing : Chemical and biological sensing
Conf. info. (Number):	2000
Conf. info. (Venue):	Orlando, FL, USA
Conf. info. (Date):	2000.04.24-2000.04.25

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