Performance study on thin resist for advanced reticle fabrication

Author(s):

• Kobayashi,H. ( HOYA Corp. )
• Higuchi,T.
• Asakawa,K.
• Yokoya,Y.

Publication title:

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3996

Pub. Year:

2000

Page(from):

226

Page(to):

234

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436146 [0819436143]

Language:

English

Call no.:

P63600/3996

Type:

Conference Proceedings