CAR blanks feasibility study results

CAR blanks feasibility study results

Author(s):

Yokoya,Y. ( HOYA Corp. )

Publication title:

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3996

Pub. Year:

2000

Page(from):

114

Page(to):

119

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819436146 [0819436143]

Language:

English

Call no.:

P63600/3996

Type:

Conference Proceedings

Details

TDL ID:	ZA00017587
Series ID:	PA00000029
Conf. info. (Name):	European Mask and Lithography Conference : European Conference on Mask Technology for Integrated Circuits and Microcomponents
Conf. info. (Number):	1999 : 16th
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	1999.11.15-1999.11.16

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