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Viewport influence on optical pyrometry and deposition process in MOCVD vertical rotating disc reactors

Author(s):
Publication title:
Optical microstructural characterization of semiconductors : sympoisum held November 29-30, 1999, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
588
Pub. Year:
2000
Page(from):
315
Pub. info.:
Warrendale, Pa.: MRS-Materials Research Society
ISSN:
02729172
ISBN:
9781558994966 [1558994963]
Language:
English
Call no.:
M23500/588
Type:
Conference Proceedings

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