SIMULTANEOUS REAL TIME SPECTROSCOPIC ELLIPSOMETRY AND REFLECTANCE FOR MONITORING SEMICONDUCTOR AND THIN FILM PREPARATION

SIMULTANEOUS REAL TIME SPECTROSCOPIC ELLIPSOMETRY AND REFLECTANCE FOR MONITORING SEMICONDUCTOR AND THIN FILM PREPARATION

Author(s):

Publication title:

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

324

Pub. Year:

1994

Page(from):

33

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992238 [1558992235]

Language:

English

Call no.:

M23500/324

Type:

Conference Proceedings

Details

TDL ID:	ZA00017537
Series ID:	PA00000011
Conf. info. (Name):	Symposium on diagnostic techniques for semiconductor materials processing
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.02

Similar Items:

1 Conference Proceedings *SURFACE MICROSTRUCTURAL EVOLUTION OF ULTRATHIN FILMS BY REAL TIME SPECTROSCOPIC ELLIPSOMETRY Collins, R. W., An, Ilsin, Li, Y. M., Wronski, C. R. Materials Research Society	7 Conference Proceedings Real-Time Monitoring of Semiconductor Growth by Spectroscopic Ellipsometry Johs, B., Hale, J., Herzinger, C., Doctor, D., Elliott, K., Olson, G., Chow, D., Roth, J., Ferguson, I., Pelczynski, M., … MRS - Materials Research Society
2 Conference Proceedings PREPARATION AND OPTICAL PROPERTIES OF ULTRATHIN SILICON FILMS Collins, R. W., Nguyen, Hien V., An, Ilsin, Lu, Yiwei, Wakagi, M. MRS - Materials Research Society	8 Conference Proceedings Real Time Spectroscopic Ellipsometry Studies of the Solid Phase Crystallization of Amorphous Silicon Fujiwara, H., Koh, Joohyun, Lee, Yeeheng, Wronski, C. R., Collins, R. W. MRS - Materials Research Society
3 Conference Proceedings Characterization of Compositional Gradients in Amorphous Semiconductor Thin Films by Real Time Spectroscopic Ellipsometry Kim, S., Lu, Y., Collins, R. W. MRS - Materials Research Society	9 Conference Proceedings MODIFICATION OF a-Si(:H) BY THERMALLY GENERATED ATOMIC HYDROGEN: A REAL TIME SPECTROSCOPIC ELLIPSOMETRY STUDY OF Si BOND BREAKING An, I., Li, Y., Wronski, C.R., Collins, R.W. Materials Research Society
4 Conference Proceedings Rotating-Compensator Multichannel Ellipsometry: Applications in Process Development for Nanocrystalline Diamond Thin Films Collins, R. W., Lee, Joungchel, Rovira, P. I., An, Ilsin MRS - Materials Research Society	10 Conference Proceedings Extension of Multichannel Spectroscopic Ellipsometry Into the Ultraviolet for Real-Time Characterization of the Growth of Wide-Bandgap Materials From 1.5 to 6.5 … Zapien, J. A., Collins, R. W., Messier, R. MRS - Materials Research Society
5 Conference Proceedings Analysis of Compositionally and Structurally Graded Si:H and Si₁₋xGex:H Thin Films by Real Time Spectroscopic Ellipsometry Nikolas J. Podraza, Jing Li, Christopher R. Wronski, Mark W. Horn, Elizabeth C. Dickey, Robert W. Collins Materials Research Society	11 Conference Proceedings Real-Time Spectroscopic Ellipsometry of Sputtered CdTe Thin Films: Effect of Ar Pressure on Structural Evolution and Photovoltaic Performance Robert Collins, Michelle Nicole Sestak, Jian Li, Naba Raj Paudel, Kristopher Wieland, Jie Chen, Courtney Thornberry, … Materials Research Society
6 Conference Proceedings Real Time Ellipsometry Characterization and Process Monitoring for Amorphous Carbon Deposition Collins,R.W. Trans Tech Publications	12 Conference Proceedings Development of Deposition Phase Diagrams for Thin Film Si:H and Si1-xGex:H Using Real Time Spectroscopic Podraza, N.J., Ferreira, G.M., Wronski, C.R, Collins, R.W. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12