WAFER BONDING FOR HYBRID CIRCUIT THCHNOLOGY USING SOLID-STATE REACTIONS
- Author(s):
Ma, Z. Zhou, G. L. Shen, T. C. Lin, M. E. Hsieh, K. C. Allen, L. H. Morkoc, H. - Publication title:
- Joining and adhesion of advanced inorganic materials : symposium held April 12-14, 1993, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 314
- Pub. Year:
- 1993
- Page(from):
- 241
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992122 [155899212X]
- Language:
- English
- Call no.:
- M23500/314
- Type:
- Conference Proceedings
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