Effects of Lateral Limited Area and Substrate Compliance on Strain Distribution and Critical Thickness of SiGe Film on Si Mesa Substrates
- Author(s):
Rong, Zhang Hongbin, Huang Yi, Shi Kai, Yang Shulin, Gu Ronghua, Wang Shunming, Zhu Youdou, Zheng - Publication title:
- Strained layer epitaxy - materials processing and device applications : symposium held April 17-19, 1995, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 379
- Pub. Year:
- 1995
- Page(from):
- 61
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992825 [1558992820]
- Language:
- English
- Call no.:
- M23500/379
- Type:
- Conference Proceedings
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