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Templating Nanopores into Poly(Methylsilsesquioxane): New Low-Dielectric Coatings Suitable for Microelectronic Applications

Author(s):
Remenar, Julius F.
Hawker, Craig J.
Hedrick, James L.
Kim, Sung Mog
Miller, Robert D.
Nguyen, Cattien
Trollsas, Mikael
Yoon, Do Y.
3 more
Publication title:
Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
511
Pub. Year:
1998
Page(from):
69
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994171 [1558994173]
Language:
English
Call no.:
M23500/511
Type:
Conference Proceedings

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