Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Phase Transformation and Ion-Beam-Induced Crystallization in SiC Layers Formed by MEVVA Implantation of Carbon Into Silicon

Author(s):

Publication title:

Phase transformations and systems driven far from equilibrium : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

481

Pub. Year:

1998

Page(from):

407

Pub. info.:

Warrendale, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993860 [155899386X]

Language:

English

Call no.:

M23500/481

Type:

Conference Proceedings

Details

TDL ID:	ZA00017526
Series ID:	PA00000011
Conf. info. (Name):	Symposium on phase transformations and systems driven far from equilibrium
Conf. info. (Number):	1997
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1997.12.01-1997.12.05

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