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Profile Simulation of Reactive Ion Etching for Silicon Tip-on-Post and Bottleneck Structures in FED Applications

Author(s):
Publication title:
Flat panel display materials III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
471
Pub. Year:
1997
Page(from):
241
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993754 [1558993754]
Language:
English
Call no.:
M23500/471
Type:
Conference Proceedings

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