Enhancement of ON/OFF Current Ratio of Polysilicon TFT by Selective Laser-Induced Crystallization of Active Layer

Enhancement of ON/OFF Current Ratio of Polysilicon TFT by Selective Laser-Induced Crystallization of Active Layer

Author(s):

Publication title:

Flat panel display materials III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

471

Pub. Year:

1997

Page(from):

191

Pub. info.:

Pittsburgh, Pa.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558993754 [1558993754]

Language:

English

Call no.:

M23500/471

Type:

Conference Proceedings

Details

TDL ID:	ZA00017525
Series ID:	PA00000011
Conf. info. (Name):	Flat panel display materials
Conf. info. (Number):	3rd
Conf. info. (Venue):	San Francisco, California, U.S.A.
Conf. info. (Date):	1997.03.31-1997.04.03

Similar Items:

1 Conference Proceedings New Excimer Laser Crystallization in the Lattice Shape to Improve the Uniformity of Electrical Characteristics of Poly-Si TFT Jeon, Jae-Hong, Park, Cheol-Min, Park, Kee-Chan, Lee, Min-Cheol, Han, Min-Koo MRS - Materials Research Society	7 Conference Proceedings Effects of Laser Annealing on the Furnace Annealed Amorphous Silicon Thin Films Choi, Kwon-Young, Jeon, Jae-Hong, Han, Min-Koo, Kim, Yong-Sang MRS - Materials Research Society
2 Conference Proceedings High-Performance of Poly-Si TFTs With Multiple Selectively Doped Regions in the Active Layer Lee, Min-Cheol, Yoo, Juhn-Suk, Park, Kee-Chan, Jung, Sang-Hoon, Han, Min-Koo, Kim, Hyun-Jae Materials Research Society	8 Conference Proceedings A New Self-Aligned Poly-Si TFT Employing A Pre-Patterned Al Mask Layer By Backside Exposure Technique Nam, Woo-Jin, Lee, Min-Cheol, Park, Kee-Chan, Lee, Jae-Hoon, Han, Min-Koo Materials Research Society
3 Conference Proceedings Low-Temperature Laser-Doping Process Using PSG and BSG Films for Poly-Si TFTs Kim, Cheon-Hong, Jung, Sang-Hoon, Jeon, Jae-Hong, Han, Min-Koo Materials Research Society	9 Conference Proceedings Temperature Dependence Of High-Mobility Poly-Si TFT With Single Grain Boundary Song, In-Hyuk, Kim, Cheon-Hong, Han, Min-Koo Materials Research Society
4 Conference Proceedings Performance of Poly-Si TFTs with Double Gate Oxide Layers Min, Byung-Hyuk, Park, Cheol-Min, Jun, Jae-Hong, Bae, Byung-Sung, Han, Min-Koo MRS - Materials Research Society	10 Conference Proceedings Characteristics of XeCl Excimer-Laser Annealed Insulator Jang, Keun-Ho, Choi, Hong-Seok, Jun, Jae-Hong, Yoo, Jhun-Suk, Han, Min-Koo MRS - Materials Research Society
5 Conference Proceedings Excimer Laser Recrystallization of Selectively Floating a-Si Active Layer for Large-Grained Poly-Si Film Kim, Cheon-Hong, Yoo, Juhn-Suk, Song, In-Hyuk, Han, Min-Koo Materials Research Society	11 Conference Proceedings Characteristics of XeCl Excimer-Laser Annealed Insulator Jang, Keun-Ho, Choi, Hong-Seok, Jun, Jae-Hong, Yoo, Jhun-Suk, Han, Min-Koo MRS - Materials Research Society
6 Conference Proceedings The Suppression of Leakage Current in the Solid Phase Crystallized Silicon (SPC-Si) TFT Employing Off-state Bias Annealing Under Light Illumination. Sang-Geun Park, Seung-Hee Kuk, Jong-Seok Woo, Min-Koo Han Materials Research Society	12 Conference Proceedings Material Properties of SIPOS Films Prepared by XeCl Excimer Laser Annealing of a-Si:Nx Films Choi, Hong-Seok, Jun, Jae-Hong, Jang, Keun-Ho, Han, Min-Koo MRS - Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12