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Study of IBAD-Deposited AlN Films for Vacuum Diode Electron Emission

Author(s):
Forsythe, E. W.
Sprague, J. A.
Khan, B. A.
Metha, S.
Smith, D. A.
Murzin, I. H.
Ahern, B.
Weyburne, D. W.
Tompa, G. S.
4 more
Publication title:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
449
Pub. Year:
1997
Page(from):
1233
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
Language:
English
Call no.:
M23500/449
Type:
Conference Proceedings

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