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Range and Damage Distribution in Cluster Ion Implantation

Author(s):
Yamada, I.
Matsuo, J.
Jones, E. C.
Takeuchi, D.
Aoki, T.
Goto, K.
Sugii, T.
2 more
Publication title:
Materials modification and synthesis by ion beam processing : symposium held December 2-5, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
438
Pub. Year:
1997
Page(from):
363
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993426 [1558993428]
Language:
English
Call no.:
M23500/438
Type:
Conference Proceedings

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