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Photo-Chemical Etching on Silicon-Carbide by Using KrF Excimer Laser and Xe2* Excimer Lamp

Author(s):
Publication title:
Advanced laser processing of materials - fundamentals and applications : symposium held November 27-30, 1995, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
397
Pub. Year:
1996
Page(from):
549
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993006 [1558993002]
Language:
English
Call no.:
M23500/397
Type:
Conference Proceedings

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