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Structural and Electrical Characterization of FeSix-Layers (1｡蛉｡？) Prepared by RTP of Fe Layers Sputtered on Si (100)

Author(s):
Libezny, M.
Poortmans, J.
Amesz, P. H.
Donaton, R. A.
Larsen, K. Kyllesbech
Vandenabeele, P.
Jonckx, F.
Maex, K.
Nijs, J.
4 more
Publication title:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
387
Pub. Year:
1995
Page(from):
389
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992900 [1558992901]
Language:
English
Call no.:
M23500/387
Type:
Conference Proceedings

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