Processing parameters for laser micromachining

Author(s):

• Angell,J. ( Resonetics,Inc. )
• Ho,W.
• Bernstein,J.S.
• Schaeffer,R.D.

Publication title:

Lasers as tools for manufacturing II : 12-14 February 1997, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2993

Pub. Year:

1997

Page(from):

65

Page(to):

74

Pub. info.:

Bellingham, Wash., USA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819424044 [0819424048]

Language:

English

Call no.:

P63600/2993

Type:

Conference Proceedings