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Planar surface-micromachined pressure sensor with a subsurface,embedded reference pressure cavity

Author(s):
Publication title:
Micromachined devices and components II : 14-15 October 1996, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2882
Pub. Year:
1996
Page(from):
259
Page(to):
265
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422804 [0819422800]
Language:
English
Call no.:
P63600/2882
Type:
Conference Proceedings

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