Blank Cover Image

Modeling of light scattering from structures with particle contaminants

Author(s):
Publication title:
Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2862
Pub. Year:
1996
Page(from):
139
Page(to):
150
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422507 [0819422509]
Language:
English
Call no.:
P63600/2862
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Light scattering from patterned surfaces and particles on surfaces

Nebeker,B.M., Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Prediction of light scattering from particles on a filmed surface using discrete-dipole approximation

Zhang, H.P., Hirleman, E.D.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Prediction of light scattering characteristics of particles and structures on surfaces by the coupled-dipole method

Nebeker,B.M., Schmehl,R., Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Defect characterization and light scattering by PSI spheres on tungsten CMP wafers

Ding,P., Starr,C.W., Chowdhury,R., Hirleman,E.D.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Azimuthal dependence of coherent light scatter from patterned surfaces

Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Structure Solution of Molecular Crystals from Powder Diffraction Data Using Genetic Algorithms: Opportunities in Academic and Industrial Research

Harris, K.D.M., Johnston, R.L., Kariuki, B.M., Tedesco, E., Turner, G.W.

Trans Tech Publications
4 Conference Proceedings Comparison of experimentally measured differential scattering cross sections of PSL spheres on flat surfaces and patterned surfaces

Starr,G.W., Hirleman,E.D.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Measurement of Silicon Particles by Laser Surface Scanning and 365 Angle-Resolved Light Scattering

Huff, H.R., Goodall, R.K., Williams, E., Woo, K-S., Liu, B.Y.H., Warner, T., Hirleman, D., Gildersleeve, K., Bullis, …

Electrochemical Society
5 Conference Proceedings Identification and characterization of bacteria on surfaces using light scattering

Nebeker,B.M., Buckner,B.D., Hirleman,E.D., Lathrop,A., Bhunia,A.K.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Structure Determination of 4,4'-Trimethylenedipyridine from Powder Diffraction Data

Tedesco, E., Dhillon, S.S., Harris, K.D.M., Johnston, R.L., Turner, G.W., Kariuki, B.M.

Trans Tech Publications
6 Conference Proceedings Analytical first-order model of light scattering from submicron pyramidal pits

Jordan Jr.,M., Diaz,R.E., Hirleman,E.D.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Polarized light scattering from metallic particles on silicon wafers

Kim,J.H., Ehrman,S.H., Mulholland,G.W., Germer,T.A.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12