Selection of calibration particles for scanning surface inspection systems

Author(s):

• Mulholland,G.W. ( National Institute of Standards and Technology )
• Bryner,N.
• Liggett,W.
• Scheer,B.W.
• Goodall,R.K.

Publication title:

Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2862

Pub. Year:

1996

Page(from):

104

Page(to):

118

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422507 [0819422509]

Language:

English

Call no.:

P63600/2862

Type:

Conference Proceedings